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Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 37, Issue 12, 1998, Pages 6544-6551

Al-Cu texture enhancement by underlayer texture

(2) Sasaki, Tsutomu a Dohnomae, Hitoshi a

a NIPPON STEEL CORPORATION (Japan)

Author keywords

Al; Electromigration; Texture; Thin films

Indexed keywords

ALUMINUM ALLOYS; CRYSTAL ORIENTATION; ELECTROMIGRATION; FILM GROWTH; GRAIN GROWTH; NUCLEATION; TEXTURES;

FULL WIDTH AT HALF MAXIMUM (FWHM);

METALLIC FILMS;

EID: 0032303320 PISSN: 00214922 EISSN: None Source Type: Journal
DOI: 10.1143/jjap.37.6544 Document Type: Article

Times cited : (11)

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