Pulsed ion sheath dynamics in a cylindrical bore for inner surface grid-enhanced plasma source ion implantation

Chinese Physics Letters

Volumn 19, Issue 10, 2002, Pages 1473-1475

  Wang, Jiu Li ^a   Zhang, Gu Ling ^a   Fan, Song Hua ^a   Yang, Wu Bao ^a   Yang, Si Ze ^a,b,c  

^a INSTITUTE OF PHYSICS   (China)

^b XIAMEN UNIVERSITY   (China)

^c DALIAN UNIVERSITY OF TECHNOLOGY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

BOLTZMANN EQUATION; CYLINDERS (SHAPES); FINITE DIFFERENCE METHOD; ION IMPLANTATION; PLASMA SHEATHS; POISSON DISTRIBUTION;

CYLINDRICAL BORE; CYLINDRICAL GEOMETRY; GRID-ENHANCED PLASMA SOURCE ION IMPLANTATIONS; IMPLANTATION TECHNIQUE; INNER SURFACES; ION SHEATH; MODIFICATION OF MATERIALS; SHEATH DYNAMICS; SURFACE GRIDS; SURFACE-MODIFICATION;

POISSON EQUATION;

EID: 0036799175     PISSN: 0256307X     EISSN: None     Source Type: Journal    
DOI: 10.1088/0256-307X/19/10/323     Document Type: Article

References (13)

1. Conrad J.R., Radtke J.L., Dodd R.A., Worzala F.J. and Tran N.C. 1987 J. Appl. Phys. 62 4591.
2. Chu P.K., Qin S., Chan C., Cheung N.W. and Larson L.A. 1996 Mater. Sci. Eng. 17 207.
3. Sheridan T.E. 1993 J. Appl. Phys. 74 4903.
4. Sun M., Yang S.Z. and Li B. 1996 J. Vac. Sci. Technol. A 14 367.
5. Zeng X.C., Liu A.G., Kwok T.K., Chu P.K. and Tang B.Y. 1997 Phys. Plasma 4 4431.
6. Liu B., Zhang G.L., Cheng D.J., Liu C.Z., He R. and Yang S.Z. 2001 J. Vac. Sci. Technol. A 19 2958.
7. Zeng X.C., Tang B.Y. and Chu P.K. 1996 Appl. Phys. Lett. 69 3815.
8. Zeng X.C., Kwok T.K., Liu A.G., Chu P.K., Tang B.Y. and Sheridan T.E. 1998 IEEE Trans. Plasma Sci. 26 175.
9. Sun M., Zhu P. and Yang S.Z. 1996 J. Phys. D 29 274.
10. Liu B., Liu C.Z., Cheng D.J., Zhang G.L., He R. and Yang S.Z. 2001 Nucl. Instrum. Methods B 184 644.
11. Zhou G.C., Cai C.L., Cao J.B., Zhang Y.T., Chen T. and Wang D.J. 1999 Chin. Phys. Lett. 16 461.
12. Cai C.L., Zhou G.C., Cao J.B. and Wang D.J. 1999 Chin. Phys. Lett. 16 856.
13. Lieberman M.A. and Lichtenberg A.J. 1994 Principles of Plasma Discharges and Materials Processing (New York: Wiley) chap 5 p 137.