Pulsed sheath dynamics in a small cylindrical bore with an auxiliary electrode for plasma immersion ion implantation

Physics of Plasmas

Volumn 4, Issue 12, 1997, Pages 4431-4434

  Zeng, X C ^a   Liu, A G ^a   Kwok, T K ^a   Chu, P K ^a   Tang, B Y ^a  

^a CITY UNIVERSITY OF HONG KONG   (Hong Kong)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0011053110     PISSN: 1070664X     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.872607     Document Type: Article

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