A model of plasma source ion implantation for inner surface modification

Journal of Physics D: Applied Physics

Volumn 29, Issue 1, 1996, Pages 274-276

  Sun, Mu ^a   Zhu, P ^a   Yang, S Z ^a  

^a INSTITUTE OF PHYSICS   (China)

Author keywords

[No Author keywords available]

Indexed keywords

CALCULATIONS; DIFFERENTIAL EQUATIONS; INTEGRATION; MATHEMATICAL MODELS; PLASMA SOURCES; PLASMAS; SURFACE TREATMENT;

INNER SURFACE MODIFICATION; PLASMA SOURCE ION IMPLANTATION; SHEATH EDGE POSITION; TRANSIENT SHEATH;

ION IMPLANTATION;

EID: 0029777136     PISSN: 00223727     EISSN: None     Source Type: Journal    
DOI: 10.1088/0022-3727/29/1/042     Document Type: Article

References (8)

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4. Conrad J R, Radtke J L, Dodd R A, Worzala F J and Qiu X 1987 Bull. Am. Phys. Soc. 32 1894
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