The CantiClever: A dedicated probe for magnetic force microscopy

IEEE Transactions on Magnetics

Volumn 38, Issue 5 I, 2002, Pages 2441-2443

  Van den Bos, Arnout ^a   Heskamp, Iwan ^a   Siekman, Martin ^a   Abelmann, Leon ^a   Lodder, Cock ^a  

^a UNIVERSITY OF TWENTE   (Netherlands)

Author keywords

Cantilevers; Integration; Magnetic force microscopy (MFM); Magnetic tips

Indexed keywords

ASPECT RATIO; ATOMIC FORCE MICROSCOPY; MAGNETIC RECORDING; MICROMACHINING; SILICON;

MAGNETIC FORCE MICROSCOPY (MFM);

MAGNETIC MATERIALS;

EID: 0036761966     PISSN: 00189464     EISSN: None     Source Type: Journal    
DOI: 10.1109/TMAG.2002.803585     Document Type: Article

References (11)

1. L. Abelmann, S. Porthun, M. Haast, C. Lodder, A. Moser, M.E. Best, P.J.A. Vanschendel, B. Stiefel, H.J. Hug, G.P. Heydon, A. Farley, S.R. Hoon, T. Pfaffelhuber, R. Proksch, and K. Babcock, "Comparing the resolution of magnetic force microscopes using the CAMST reference samples," J. Magn. Magn. Mat., vol. 190, no. 1-2, pp. 135-147, 1998.
2. L. Folks, M.E. Best, P.M. Rice, B.D. Terris, D. Weller, and J.N. Chapman, "Perforated tips for high-resolution in-plane magnetic force microscopy," Appl. Phys. Lett., vol. 76, no. 7, pp. 909-911, 2000.
3. S. Porthun, L. Abelmann, and C. Lodder, "Magnetic force microscopy of thin film media for high density magnetic recording," J. Magn. Magn. Mat., vol. 182, no. 1-2, pp. 238-273, 1998.
4. S. Porthun, L. Abelmann, S.J.L. Vellekoop, J.C. Lodder, and H.J. Hug, "Optimization of lateral resolution in magnetic force microscopy," Appl. Phys. A-Mater. Sci. Processing, vol. 66, pp. S1185-S1189, 1998.
5. T.R. Albrecht and C.F. Quate, "Atomic resolution with the atomic force microscope on conductors and non conductors," J. Vac. Sci. Technol. A-Vac. Surf. Films, vol. 6, no. 2, pp. 271-274, 1988.
6. P.B. Fischer, M.S. Wei, and S.Y. Chou, "Ultrahigh resolution magnetic force microscope tip fabricated using electron beam lithography," J. Vac. Sci. Technol. B, vol. 11, no. 6, pp. 2570-2573, 1993.
7. G.D. Skidmore and E.D. Dahlberg, "Improved spatial resolution in magnetic force microscopy," Appl. Phys. Lett., vol. 71, no. 22, pp. 3293-3295, 1997.
8. M. Ruhrig, S. Porthun, J.C. Lodder, S. McVitie, L.J. Heyderman, A.B. Johnston, and J.N. Chapman, "Electron beam fabrication and characterization of high-resolution magnetic force microscopy tips," J. Appl. Phys., vol. 79, no. 6, pp. 2913-2919, 1996.
9. G.N. Phillips, L. Abelmann, M. Siekman, and J.C. Lodder, "High resolution magnetic force microscopy using focussed ion beam modified tips," Appl. Phys. Lett., 2000, to be published.
10. L. Meirovitch, Fundamentals of Vibrations, International ed, set. Mechanical Engineering. New York: McGraw-Hill, 2001.
11. M. Vangbo and Y. Bäcklund, "Precise mask alignment to the crystallographic orientation of silicon wafers using wet anisotropic etching," J. Micromech. Microeng., vol. 6, pp. 279-284, 1996.