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Volumn 46, Issue 9, 2002, Pages 1333-1338

Design and optimization of thin film fully depleted vertical surrounding gate (VSG) MOSFETs for enhanced short channel immunity

Author keywords

Semiconductor device modeling; Short channel effects; Silicon; Vertical surrounding gate MOSFET

Indexed keywords

GATES (TRANSISTOR); OPTIMIZATION; SEMICONDUCTING SILICON; SEMICONDUCTOR DEVICE MODELS; THIN FILMS; THRESHOLD VOLTAGE; ULSI CIRCUITS;

EID: 0036721817     PISSN: 00381101     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0038-1101(02)00064-3     Document Type: Article
Times cited : (13)

References (12)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.