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Volumn 46, Issue 9, 2002, Pages 1333-1338
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Design and optimization of thin film fully depleted vertical surrounding gate (VSG) MOSFETs for enhanced short channel immunity
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Author keywords
Semiconductor device modeling; Short channel effects; Silicon; Vertical surrounding gate MOSFET
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Indexed keywords
GATES (TRANSISTOR);
OPTIMIZATION;
SEMICONDUCTING SILICON;
SEMICONDUCTOR DEVICE MODELS;
THIN FILMS;
THRESHOLD VOLTAGE;
ULSI CIRCUITS;
SHORT CHANNEL IMMUNITY;
VERTICAL SURROUNDING GATES (VSG);
MOSFET DEVICES;
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EID: 0036721817
PISSN: 00381101
EISSN: None
Source Type: Journal
DOI: 10.1016/S0038-1101(02)00064-3 Document Type: Article |
Times cited : (13)
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References (12)
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