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Volumn 38, Issue 9, 2002, Pages 1234-1237
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Normal-incidence InAs self-assembled quantum-dot infrared photodetectors with a high detectivity
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Author keywords
[No Author keywords available]
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Indexed keywords
ATOMIC FORCE MICROSCOPY;
ELECTRON TRANSITIONS;
ETCHING;
MOLECULAR BEAM EPITAXY;
PHOTOLITHOGRAPHY;
RAPID THERMAL ANNEALING;
SEMICONDUCTING ALUMINUM COMPOUNDS;
SEMICONDUCTING INDIUM COMPOUNDS;
SEMICONDUCTOR DEVICE MANUFACTURE;
SEMICONDUCTOR DEVICE STRUCTURES;
SEMICONDUCTOR QUANTUM DOTS;
TRANSMISSION ELECTRON MICROSCOPY;
ALUMINUM GALLIUM ARSENIDE;
INDIUM ARSENIDE;
INTRABAND TRANSITIONS;
SELF-ASSEMBLED QUANTUM DOT INFRARED PHOTODETECTOR;
WET CHEMICAL ETCHING;
PHOTODETECTORS;
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EID: 0036712188
PISSN: 00189197
EISSN: None
Source Type: Journal
DOI: 10.1109/JQE.2002.802159 Document Type: Article |
Times cited : (56)
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References (13)
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