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Volumn 5, Issue 9, 2002, Pages
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Ten nanometer surface intrusions in room-temperature silicon
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Author keywords
[No Author keywords available]
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Indexed keywords
AIR;
BORON;
CRYSTAL DEFECTS;
ETCHING;
GROWTH (MATERIALS);
NUCLEATION;
SURFACES;
TRANSMISSION ELECTRON MICROSCOPY;
NONCRYSTALLINE INTRUSIONS;
ROOM TEMPERATURE SILICON;
TEN NANOMETER SURFACE INTRUSIONS;
TRANSMISSION ELECTRON MICROSCOPE;
SILICON WAFERS;
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EID: 0036712186
PISSN: 10990062
EISSN: None
Source Type: Journal
DOI: 10.1149/1.1494877 Document Type: Article |
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Times cited : (8)
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References (15)
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