High-resolution electron microscopy: From imaging toward measuring

IEEE Transactions on Instrumentation and Measurement

Volumn 51, Issue 4, 2002, Pages 611-615

  Van Aert, Sandra ^b   Den Dekker, Arnold J ^b   Van Den Bos, Adriaan ^a,b   Van Dyck, Dirk ^c  

^a IEEE

^b DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

^c UNIVERSITY OF ANTWERP   (Belgium)

Author keywords

Parameter estimation; Precision; Quantitative model based high resolution electron microscopy; Statistical experimental design

Indexed keywords

ATOMS; MATHEMATICAL MODELS; PARAMETER ESTIMATION; POSITION MEASUREMENT; STATISTICAL METHODS;

ATOMS POSITION MEASUREMENT; QUALITATIVE IMAGING INSTRUMENT; QUANTITATIVE IMAGING INSTRUMENT;

HIGH RESOLUTION ELECTRON MICROSCOPY;

EID: 0036703446     PISSN: 00189456     EISSN: None     Source Type: Journal    
DOI: 10.1109/TIM.2002.802250     Document Type: Article

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