SCOPUS 정보 검색 플랫폼

Journal of the Electrochemical Society

Volumn 149, Issue 8, 2002, Pages

Electrostatic actuators with intrinsic stress gradient. II. Performance and modelling

(2) Chinthakindi, Anil K a Kohl, Paul A a

a Georgia Institute of Technology (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITANCE; ELECTRIC POTENTIAL; ELECTRODES; ELECTROSTATICS; MATHEMATICAL MODELS; NUMERICAL METHODS; RESONATORS; STRESSES; VARIABLE FREQUENCY OSCILLATORS;

ELECTROSTATIC ACTUATOR; INTRINSIC STRESS GRADIENT;

MICROELECTROMECHANICAL DEVICES;

EID: 0036687984 PISSN: 00134651 EISSN: None Source Type: Journal
DOI: 10.1149/1.1486455 Document Type: Article

Times cited : (13)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.