Elastic bending of semiconductor wafer revisited and comments on Stoney's equation

Journal of the Electrochemical Society

Volumn 145, Issue 10, 1998, Pages 3621-3627

  Chu, S N G ^a,b  

^a LUCENT TECHNOLOGIES   (United States)

^b ELECTROCHEMICAL SOCIETY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BENDING (DEFORMATION); CALCULATIONS; MATHEMATICAL MODELS; RESIDUAL STRESSES; SEMICONDUCTING GALLIUM ARSENIDE; SILICON WAFERS; STRESSES; THERMAL EXPANSION; THIN FILMS;

LATTICE MISMATCH; SEMICONDUCTOR WAFER; STONEY EQUATION; WAFER CURVATURE;

SEMICONDUCTOR MATERIALS;

EID: 0032186648     PISSN: 00134651     EISSN: None     Source Type: Journal    
DOI: 10.1149/1.1838853     Document Type: Review

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