Influence of surface roughness on measuring depth profiles and the total amount of implanted ions by RBS and ERDA

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 136-138, Issue , 1998, Pages 628-632

  Behrisch, R ^a   Grigull, S ^a,b   Kreissig, U ^b   Grotzschel R ^b  

^a MAX PLANCK INSTITUT FÜR PLASMAPHYSIK   (Germany)

^b INSTITUTE OF ION BEAM PHYSICS AND MATERIALS RESEARCH   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

CHLORINE; COMPUTER SIMULATION; ION BEAMS; RUTHERFORD BACKSCATTERING SPECTROSCOPY; SPATIAL VARIABLES MEASUREMENT; SURFACE ROUGHNESS;

DEPTH PROFILING; ELASTIC RECOIL DETECTION ANALYSIS (ERDA);

ION IMPLANTATION;

EID: 0032020671     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(97)00798-2     Document Type: Article

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