Simulation of ERD spectra for a surface with a periodic roughness

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 134, Issue 1, 1998, Pages 98-106

  Kitamura, A ^a   Tamai, T ^a   Taniike, A ^a   Furuyama, Y ^a   Maeda, T ^a,c   Ogiwara, N ^b   Saidoh, M ^b  

^a KOBE UNIVERSITY OF MERCANTILE MARINE   (Japan)

^b JAPAN ATOM ENER RESEARCH INSTITUTE   (Japan)

^c KTI Semiconductors Co Ltd   (Japan)

Author keywords

Deuterium analysis; Geometrical effect; Non Rutherford scattering cross section; Optical grating base; Pb coating RBS method; Simultaneous RBS and ERD

Indexed keywords

DIFFRACTION GRATINGS; PLASTIC FILMS; POLYETHYLENES; RUTHERFORD BACKSCATTERING SPECTROSCOPY; SPECTRUM ANALYSIS; THIN FILMS;

ELECTRON RECOIL DETECTION (ERD) SPECTROSCOPY;

DEUTERIUM;

EID: 0031675926     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(98)80038-4     Document Type: Article

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