Effect of substrates on CuInSe2 nanoparticle thin films by radio frequency reactive sputtering

Chinese Physics Letters

Volumn 19, Issue 8, 2002, Pages 1199-1202

  Huang, Shi Yong ^a,b   Zhang, Li De ^a   Li, Guang Hai ^a   Dai, Zhen Hong ^a,b   Zhu, Xiao Guang ^a   Qu, Feng Qin ^b   Fu, Sheng Qi ^b   Zhong, Yu Rong ^b   Miao, Ye ^b  

^a INSTITUTE OF SOLID STATE PHYSICS   (China)

^b YANTAI UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

COPPER COMPOUNDS; INDIUM COMPOUNDS; MAGNETRON SPUTTERING; RADIO WAVES; REACTIVE SPUTTERING; SEMICONDUCTOR QUANTUM DOTS; SUBSTRATES; TEMPERATURE; THIN FILMS;

ARGON GAS; LOWS-TEMPERATURES; PARTICLE DIAMETERS; POWER DENSITIES; RADIO FREQUENCY REACTIVE MAGNETRON SPUTTERING; RADIO-FREQUENCY REACTIVE SPUTTERING; SPUTTERING PARAMETERS; SUBSTRATES TEMPERATURE; TERNARY COMPOUND SEMICONDUCTORS; TERNARY ELEMENT;

SELENIUM COMPOUNDS;

EID: 0036679079     PISSN: 0256307X     EISSN: None     Source Type: Journal    
DOI: 10.1088/0256-307X/19/8/351     Document Type: Article

References (14)