Fabrication process of fine electrodes using shadow mask evaporation and tip-induced local oxidation

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 41, Issue 7 B, 2002, Pages 4883-4886

  Akai, Tomonori ^b   Abe, Takumi ^b   Ishibashi, Masayoshi ^a   Kato, Midori ^a   Heike, Seiji ^a   Shimomura, Takeshi ^b   Okai, Makoto ^a   Hashizume, Tomihiro ^a   Ito, Kohzo ^b  

^a HITACHI LTD   (Japan)

^b UNIVERSITY OF TOKYO   (Japan)

Author keywords

Atomic force microscope; Carbon nanotube; Molecular devices; Nano fabrication; Shadow mask evaporation; Tip induced local oxidation

Indexed keywords

ATOMIC FORCE MICROSCOPY; ELECTRIC CONDUCTIVITY; ELECTRODES; MASKS; OXIDATION; SCANNING ELECTRON MICROSCOPY; SCANNING TUNNELING MICROSCOPY;

SHADOW MASK EVAPORATION;

MOLECULAR PHYSICS;

EID: 0036657148     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.41.4883     Document Type: Conference Paper

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