Influence of substrate temperature to prepare C-axis-oriented AlN films on rotated Y-cut quartz(ST-quartz)

Japanese Journal of Applied Physics, Part 2: Letters

Volumn 39, Issue 2 B, 2000, Pages

  Wu, Long ^a   Wu, Sean ^a   Chure, Ming Cherng ^b  

^a NATIONAL CHENG KUNG UNIVERSITY   (Taiwan)

^b FAR EAST UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM COMPOUNDS; CRYSTAL ORIENTATION; CRYSTAL STRUCTURE; FILM PREPARATION; MAGNETRON SPUTTERING; MORPHOLOGY; PIEZOELECTRIC MATERIALS; SCANNING ELECTRON MICROSCOPY; TEMPERATURE; THERMAL EFFECTS; X RAY DIFFRACTION ANALYSIS;

NITROGEN GAS; PIEZOELECTRIC FILMS; SUBSTRATE TEMPERATURES;

THIN FILMS;

EID: 0033871066     PISSN: 00214922     EISSN: None     Source Type: None    
DOI: 10.1143/JJAP.39.L172     Document Type: Article

References (15)