Crystalline structure and surface morphology of AIN films sputtered on rotated Y-cut quartz (ST-quartz)

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 40, Issue 2 A, 2001, Pages 794-797

  Wu, S ^a   Wu, L ^a   Shen, Y T ^a   Chang, F C ^a  

^a NATIONAL CHENG KUNG UNIVERSITY   (Taiwan)

Author keywords

AIN; C axis oriented; Sputtering; ST quartz

Indexed keywords

ATOMIC FORCE MICROSCOPY; CRYSTAL ORIENTATION; GRAIN SIZE AND SHAPE; MAGNETRON SPUTTERING; MORPHOLOGY; PIEZOELECTRIC MATERIALS; QUARTZ; SURFACES; THIN FILMS; X RAY DIFFRACTION ANALYSIS;

PIEZOELECTRIC FILMS; POLYCRYSTALLINE HEXAGONAL; SPUTTERED ON ROTATED Y CUT QUARTZ; SURFACE MICROSTRUCTURE;

ALUMINUM NITRIDE;

EID: 0035246574     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.40.794     Document Type: Article

References (17)