Temperature compensation with AlN film on Y-128° LiNbO3

Japanese Journal of Applied Physics, Part 2: Letters

Volumn 40, Issue 5 A, 2001, Pages

  Wu, S ^a   Wu, L ^a   Chang, F C ^a   Chang, J H ^a  

^a NATIONAL CHENG KUNG UNIVERSITY   (Taiwan)

Author keywords

AlN; C axis oriented; Oscillator; Sputtering; TCF; Y 128 LiNbO3

Indexed keywords

ACOUSTIC SURFACE WAVE DEVICES; ALUMINUM NITRIDE; CRYSTAL STRUCTURE; ELECTRODES; LITHIUM NIOBATE; MAGNETRON SPUTTERING; OSCILLATORS (ELECTRONIC); SUBSTRATES; THERMAL EFFECTS;

ELECTROMECHANICAL-COUPLINGS;

THIN FILMS;

EID: 0035328927     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.40.l471     Document Type: Article

References (11)