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Journal of Materials Research

Volumn 17, Issue 7, 2002, Pages 1855-1862

Thermal expansion of low-pressure chemical vapor deposition polysilicon films

(3) Kahn, H a Ballarini, R a Heuer, A H a

a Case Western Reserve University (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; CHEMICAL VAPOR DEPOSITION; RESIDUAL STRESSES; SINGLE CRYSTALS; SUBSTRATES; TENSILE STRESS; THERMAL EXPANSION;

LOW-PRESSURE CHEMICAL VAPOR DEPOSITION (LPCVD);

POLYSILICON;

EID: 0036648809 PISSN: 08842914 EISSN: None Source Type: Journal
DOI: 10.1557/JMR.2002.0274 Document Type: Article

Times cited : (17)

References (14)

1
- 0034469351
- (2000) J. Microelectromech. Syst. , vol.9 , pp. 485
- Yang, J.¹ Kahn, H.² He, A.Q.³ Phillips, S.M.⁴ Heuer, A.H.⁵

2
- 0037050632
- (2002) Philos. Mag. A , vol.82 , pp. 137
- Kahn, H.¹ He, A.Q.² Heuer, A.H.³

3
- 0000073841
- (1909) Proc. R. Soc. London , vol.A82 , pp. 172
- Stoney, G.G.¹

4
- 36849104521
- (1973) J. Appl. Phys. , vol.44 , pp. 534
- Brantley, W.A.¹

5
- 0009966042
- (2001) J. Mater. Res. , vol.16 , pp. 2505
- Herrero, C.P.¹

6
- 0033096744
- (1999) J. Mater. Res. , vol.14 , pp. 688
- Jayaraman, S.¹ Edwards, R.L.² Hemker, K.J.³

7
- 0010039920
- (2001) High Temperature , vol.39 , pp. 413
- Glazov, V.M.¹ Pashinkin, A.S.²

8
- 0003470014
- Saunders College Press, Philadelphia, PA
- (1976) Solid State Physics , pp. 493
- Ashcroft, N.W.¹ Mermin, N.D.²

9
- 0014464954
- (1969) Phys. Status Solidi , vol.31 , pp. 625
- Ibach, H.¹

10
- 0000144356
- (1994) Phys. Rev. B , vol.50 , pp. 14587
- Wei, S.¹ Li, C.² Chou, M.Y.³

11
- 0003906365
- CRC Press, New York
- (1997) Handbook of Physical Quantities , pp. 100
- Grigoriev, I.S.¹ Meilikhov, E.Z.²

12
- 0031125510
- (1997) J. Mater. Res. , vol.127 , pp. 915
- Ballarini, R.¹ Mullen, R.L.² Yin, Y.³ Kahn, H.⁴ Stemmer, S.⁵ Heuer, A.H.⁶

13
- 0030674703
- Thin films - Structure and Morphology, edited by S.C. Moss, D. Ila, R.C. Cammarata, C.H. Chason, T.L. Einstein, and E.D. Williams, Pittsburgh, PA
- (1997) Mater. Res. Soc. Symp. Proc. , vol.441 , pp. 403
- Yu, C.-L.¹ Flinn, P.A.² Lee, S.-H.³ Bravman, J.C.⁴

14
- 0030643642
- Materials for Mechanical and Optical Microsystems, edited by M.L. Reed, M. Elwenspoek S. Johansson, E. Obermeier, H. Fujita, and Y. Uenishi, Pittsburgh, PA
- (1997) Mater. Res. Soc. Symp. Proc. , vol.444 , pp. 185
- Sharpe, W.N.¹ Vaidyanathan, K.R.² Yuan, B.³ Edwards, R.L.⁴

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.