Diagnosis of dielectric barrier discharge CH4 plasmas for diamond-like carbon film deposition

Diamond and Related Materials

Volumn 11, Issue 8, 2002, Pages 1491-1495

  Liu, Dongping ^a   Xu, Yong ^a   Yang, Xuefeng ^a   Yu, Shiji ^a   Sun, Qi ^a   Zhu, Aimin ^a   Ma, Tengcai ^a  

^a DALIAN UNIVERSITY OF TECHNOLOGY   (China)

Author keywords

Diamond like carbon; Dielectric barrier discharge; Molecular beam mass spectrometry; Optical emission spectrometry

Indexed keywords

COATINGS; DIELECTRIC MATERIALS; ELECTRIC DISCHARGES; ELECTRONS; EMISSION SPECTROSCOPY; MASS SPECTROMETRY; METHANE; PLASMAS;

LANGMUIR DOUBLE PROBE METHOD;

DIAMOND LIKE CARBON FILMS;

DIAMOND-LIKE CARBON;

EID: 0036646875     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-9635(02)00050-X     Document Type: Article

References (16)

1. Discharge parameters and chemistry