Vacuum ultraviolet emission bands of LiLuF4:Tb3+ crystals in the spectral range from 157 to 200 nm

Microelectronic Engineering

Volumn 61-62, Issue , 2002, Pages 133-138

  Sarantopoulou, E ^a   Kollia, Z ^a   Cefalas, A C ^a  

^a INSTITUTE OF BIOLOGY   (Greece)

Author keywords

157 nm Photolithography; Dielectric crystals; Laser induced fluorescence; Trivalent rare earth ions; Vacuum ultraviolet

Indexed keywords

ABSORPTION SPECTROSCOPY; FLUORESCENCE; IMAGING TECHNIQUES; LASER APPLICATIONS; LITHIUM COMPOUNDS; PHOTOLITHOGRAPHY; SINGLE CRYSTALS; ULTRAVIOLET RADIATION; VACUUM APPLICATIONS;

DIELECTRIC CRYSTALS; VACUUM ULTRAVIOLET (VUV) LIGHT SOURCES;

MICROELECTRONICS;

EID: 0036643933     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0167-9317(02)00455-0     Document Type: Conference Paper

References (6)

1. VUV laser spectroscopy of trivalent rare earth ions in wide band-gap fluoride crystals