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Microelectronic Engineering

Volumn 57-58, Issue , 2001, Pages 93-99

Intense vacuum ultraviolet emission at 172 nm from LaF3:Nd3+ crystals

(3) Sarantopoulou, E a Kollia, Z a Cefalas, A C a

a THEORETICAL AND PHYSICAL CHEMISTRY INSTITUTE (Greece)

Author keywords

Deep UV photolithography; Dielectric crystals; Trivalent rate earth ions; Vacuum ultraviolet

Indexed keywords

ELECTRON ENERGY LEVELS; LANTHANUM COMPOUNDS; LASER APPLICATIONS; NEODYMIUM; PHOTOLITHOGRAPHY; PHOTONS; ULTRAVIOLET RADIATION; VACUUM;

DIELECTRIC CRYSTALS; VACUUM ULTRAVIOLET EMISSION;

SINGLE CRYSTALS;

EID: 0035450637 PISSN: 01679317 EISSN: None Source Type: Journal
DOI: 10.1016/S0167-9317(01)00439-7 Document Type: Conference Paper

Times cited : (3)

References (10)

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2
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3
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6
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9
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- 3+ crystals
- World Scientific, Singapore
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10
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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.