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Volumn 53, Issue 1, 2000, Pages 105-108

Wide band gap fluoride dielectric crystals doped with trivalent rare earth ions as optical materials for 157 nm photolithography

(3) Sarantopoulou, E a Kollia, Z a Cefalas, A C a

a INSTITUTE OF BIOLOGY (Greece)

Author keywords

[No Author keywords available]

Indexed keywords

ABSORPTION SPECTROSCOPY; CRYSTAL GROWTH; DIELECTRIC MATERIALS; ENERGY GAP; FLUORESCENCE; IONS; LITHIUM COMPOUNDS; OPTICAL MATERIALS; PHOTOLITHOGRAPHY; SINGLE CRYSTALS;

DIELECTRIC FLUORIDE HOST; FLUORIDE DIELECTRIC CRYSTAL; LASER INDUCED FLUORESCENCE; NONDOPED CRYSTAL; TRIVALENT RARE EARTH IONS;

MICROELECTRONIC PROCESSING;

EID: 0034206351 PISSN: 01679317 EISSN: None Source Type: Journal
DOI: 10.1016/S0167-9317(00)00274-4 Document Type: Article

Times cited : (24)

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