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Volumn 61-62, Issue , 2002, Pages 523-527

Nanostructuring of aluminum-coated scanning near-field optical microscope probes by direct, laser thermal oxidation in water

Author keywords

Laser processing; Nanolithography; Oxidation; Scanning microscope probes; Scanning near field optical microscopy

Indexed keywords

ALUMINUM; CORROSION RESISTANCE; INTERFACES (MATERIALS); LASER APPLICATIONS; LIGHT ABSORPTION; NANOTECHNOLOGY; OPTICAL COATINGS; OPTICAL MICROSCOPY; OXIDATION; PASSIVATION; PHOTOLITHOGRAPHY; SCANNING; SILICON NITRIDE;

EID: 0036643857     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0167-9317(02)00460-4     Document Type: Conference Paper
Times cited : (7)

References (6)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.