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Volumn 61-62, Issue , 2002, Pages 523-527
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Nanostructuring of aluminum-coated scanning near-field optical microscope probes by direct, laser thermal oxidation in water
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Author keywords
Laser processing; Nanolithography; Oxidation; Scanning microscope probes; Scanning near field optical microscopy
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Indexed keywords
ALUMINUM;
CORROSION RESISTANCE;
INTERFACES (MATERIALS);
LASER APPLICATIONS;
LIGHT ABSORPTION;
NANOTECHNOLOGY;
OPTICAL COATINGS;
OPTICAL MICROSCOPY;
OXIDATION;
PASSIVATION;
PHOTOLITHOGRAPHY;
SCANNING;
SILICON NITRIDE;
SCANNING MICROSCOPE PROBES;
MICROELECTRONICS;
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EID: 0036643857
PISSN: 01679317
EISSN: None
Source Type: Journal
DOI: 10.1016/S0167-9317(02)00460-4 Document Type: Conference Paper |
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Times cited : (7)
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References (6)
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