Structure and mechanical properties of Ti/C multilayer films deposited by sputtering

Nippon Kinzoku Gakkaishi/Journal of the Japan Institute of Metals

Volumn 66, Issue 7, 2002, Pages 778-783

  Inoue, Shozo ^a   Nagai, Kenji ^a   Niibe, Masahito ^a   Koterazawa, Keiji ^a   Iwasa, Mikio ^a  

^a UNIVERSITY OF HYOGO   (Japan)

Author keywords

Dc sputtering; Hardness; Multilayer film; Structure; X ray diffraction (XRD)

Indexed keywords

HARDNESS TESTING; MAGNETRON SPUTTERING; SURFACE ROUGHNESS; X RAY DIFFRACTION;

MULTILAYER FILMS;

METALLIC FILMS;

EID: 0036631008     PISSN: 00214876     EISSN: None     Source Type: Journal    
DOI: 10.2320/jinstmet1952.66.7_778     Document Type: Article

References (17)