Carbon/titanium multilayers as soft-x-ray mirrors for the water window

Applied Optics

Volumn 37, Issue 25, 1998, Pages 6002-6005

  Stock, Hans Juergen ^a   Haindl, Gabriele ^a   Hamelmann, Frank ^a   Menke, Detlef ^a   Wehmeyer, Oliver ^a   Kleineberg, Ulf ^a   Heinzmann, Ulrich ^a   Bulicke, Peter ^a   Fuchs, Detlev ^b,c   Ulm, Gerhard ^b  

^a BIELEFELD UNIVERSITY   (Germany)

^b PHYSIKALISCH TECHNISCHE BUNDESANSTALT   (Germany)

^c Ultratech Stepper Inc   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000710031     PISSN: 1559128X     EISSN: 21553165     Source Type: Journal    
DOI: 10.1364/AO.37.006002     Document Type: Article

References (19)

1. B. L. Henke, E. M. Gullikson, and J. C. Davis, “X-ray interactions: photoabsorption, scattering, transmission, and reflec tion at E = 50-30, 000 eV, Z = 1-92, ” in Atom. Data Nucl. Data Tab. 54, 181-342 (1993); optical constant files are available at www.cxro.lbl.gov.
2. E. Spiller and A. Rosenbluth, “Determination of thickness errors and boundary roughness from the measured performance of a multilayer coating, ” Opt. Eng. 25, 954-963 (1986).
3. E. J. Puik, M. J. van der Wiel, H. Zeijlemaker, and J. Verhoe-ven, “Ion etching of thin W layers: enhanced reflectivity of W-C multilayer coatings, ” Appl. Surf. Sci. 47, 63-76 (1991).
4. R.-P. Haelbich, A. Segmuller, and E. Spiller, “Smooth multilayer films suitable for x-ray mirrors, ” Appl. Phys. Lett. 34, 184-186 (1979).
5. T. W. Barbee, “Sputtered layered synthetic microstructure (LSM) dispersion elements, ” AIP Conf. Proc. 75, 131-145(1981).
6. A. Kloidt, “Herstellung von Multischichtsystemen durch Elektronenstrahlverdampfung fuer die Anwendung als Roentgen-spiegel, ” Ph.D. dissertation (University of Bielefeld, Germany, 1993).
7. 4C multilayer mirrors in the 34-50-Ä wavelength region, ” Appl. Opt. 32, 3541-3543 (1993).
8. J. Slaughter and C. Falco, “Extreme ultraviolet reflectance of thin films deposited in situ, ” paper presented at the Third International Conference on the Physics of X-Ray Multilayer Structures, Breckenridge, Colo., 3-7 March 1996; http://www.cxro.lbl.gov/multilayer/survey.html.
9. A. Fedorenko, V. Kondratenko, Yu. P. Pershin, O. Poltseva, E. Zubarev, L. Balakireva, V. Didyk, and V. Burtsev, “Structure and optical properties of multilayer x-ray mirrors for the longwave part (3.1-4.4 nm) of a water window, ” Cryst. Res. Tech-nol. 8, 1139-1147 (1994).
10. F. Schaefers, H.-Ch. Mertins, M. Mertin, I. Packe, F. Schmolla, S. Di Fonzo, G. Soullie, W. Yark, H. Grimmer, P. Boni, D. Clemens, M. Horrisberger, N. N. Salashchenko, and E. A. Shamov, “Experimental multilayer survey in the VUV, ” in Materials, Manufacturing and Measurement for Synchrotron Radiation Mirrors, P. Z. Takacs and T. W. Tonnessen, eds., Proc. SPIE 3152, 222-230 (1997).
11. F. Schaefers, H.-C. Mertins, F. Schmolla, I. Packe, N. Salashchenko, and E. Shamov, “Cr/Sc multilayers for the soft x-ray range, ” Appl. Opt. 37, 719-728 (1998).
12. E. Spiller, “Experience with the in situ monitor system for the fabrication of x-ray mirrors, ” in Applications of Thin Film Multilayered Structures to Figured X-Ray Optics, G. Marshall, ed., Proc. SPIE 563, 367-375 (1985).
13. E. Spiller, A. Segmuller, J. Rife, and R.-P. Haelbich, “Controlled fabrication of multilayer soft-x-ray mirrors, ” Appl. Phys. Lett. 37, 1048-1050 (1980).
14. E. Spiller, “Smoothing of multilayer x-ray mirrors by ion polishing, ” Appl. Phys. Lett. 23, 2293-2295 (1989).
15. E. Spiller, “Enhancement of the reflectivity of multilayer x-ray mirrors by ion polishing, ” Opt. Eng. 6, 609-613 (1990).
16. E. Puik, M. van der Wiel, H. Zeijlemaker, and J. Verhoeven, “Ion bombardment of x-ray multilayer coatings: comparison of ion etching and ion-assisted deposition, ” Appl. Surf. Sci. 251-260 (1991).
17. R. Schlatmann, C. Lu, J. Verhoeven, E. Puik, and M. van der Wiel, “Limits to ion beam etching of Mo/Si multilayer coatings, ” in Physics of X-Ray Multilayer Structures, Vol. 7 of 1992 OSA Technical Digest Series (Optical Society of America, Washington, D.C., 1992), p. PD6-1.
18. D. Fuchs, M. Krumrey, P. Mueller, F. Scholze, and G. Ulm, “High-precision soft x-ray reflectometer, ” Rev. Sci. Instrum. 66, 2248-2250 (1995).
19. N. Bowering, T. Dohring, U. Garner, and U. Heinzmann, “Spectral diagnosis of a laser-produced XUV source using a digital camera system with pinhole transmission grating, ” Laser Part. Beams 9, 593-601 (1991).