Current trends in the electrical characterization of low-k dielectrics

Proceedings of the International Semiconductor Conference, CAS

Volumn 1, Issue , 1999, Pages 27-36

  Ionescu, A M ^a   Reimbold, G ^a   Mondon, F ^a  

^a CEA LETI   (France)

Author keywords

[No Author keywords available]

Indexed keywords

DEGRADATION; INTERCONNECTION NETWORKS; MOISTURE; THERMAL EFFECTS;

EMBEDDED INTERCONNECT ARCHITECTURES;

DIELECTRIC MATERIALS;

EID: 0033335253     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Article

References (14)