Fabrication of diffractive optical elements with arbitrary surface-relief profile by direct laser writing

Optical Engineering

Volumn 41, Issue 6, 2002, Pages 1240-1245

  Wang, Chao ^a,b   Chan, Yuen Chuen ^a,b   Lam, Yee Loy ^a,b  

^a NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

^b DenseLight Semiconductors Pte Ltd   (Singapore)

Author keywords

Diffractive optical elements; Fabrication process; Laser writing

Indexed keywords

COMPUTER CONTROL SYSTEMS; DIFFRACTIVE OPTICS; LASER APPLICATIONS; OPTICAL DESIGN; OPTIMIZATION; PHOTORESISTS; PROGRAMMED CONTROL SYSTEMS; SEMICONDUCTOR DEVICE MANUFACTURE;

DIFFRACTIVE OPTICAL ELEMENTS; LASER INTENSITY; LASER WRITING;

OPTICAL DEVICES;

EID: 0036611673     PISSN: 00913286     EISSN: None     Source Type: Journal    
DOI: 10.1117/1.1476689     Document Type: Article

References (18)

1. Fabrication of continuous-relief micro-optical elements by direct laser writing in photoresists
2. Development and applications of a laser writing lithography system for maskless patterning
3. Fabrication of micro optical components by laser beam writing in photoresist
4. Direct laser writing of diffractive optical elements
5. Microlithography in the eastern bloc
6. One-level gray-tone design-mask data preparation and pattern transfer
7. Optical methods for fine line lithography
8. Fabrication of multi-level phase gratings using focused ion beam milling and electron beam lithography
9. Investigation of direct milling of micro-optical elements with continuous relief on a substrate by focused ion beam technology
10. Excimer laser micromachining of rapid fabrication of diffractive optical elements
11. Rapid fabrication of diffractive optical elements by use of image-based excimer laser ablation
12. Superzone diffractive lenses
13. Grating axicon for collimating Cerenkov radiation waves
14. Manufactures turn precision optics with diamond
15. Direct writing of continuous-relief micro-optics
16. Development of a laser writing system for the fabrication micro-optical elements
17. Development of micro-lens arrays for integration with optoelectronic devices
18. Computer aided control of the laser writing system for fabricating diffractive micro-optical elements