Computer aided control of laser writing system for fabricating continuous-relief micro-optical elements

Conference on Lasers and Electro-Optics Europe - Technical Digest

Volumn , Issue , 2000, Pages 160-

  Chan, Y C ^a   Wang, C ^a   Liaw, C Y ^a   Lam, Y L ^a  

^a NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER CONTROL SYSTEMS; DIFFRACTIVE OPTICS; LASER APPLICATIONS; LIGHT MODULATORS; OPTICAL DEVICES; OPTICAL INSTRUMENT LENSES; PROCESS CONTROL; SCANNING ELECTRON MICROSCOPY; ULTRAVIOLET RADIATION;

LASER INTENSITY VARIATION; LASER WRITING; MICROOPTICAL LENSES;

MICROOPTICS;

EID: 0033697705     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (0)