(200)-predominant growth of radio-frequency sputtered SrBi2Ta2O9 thin films

Journal of Materials Research

Volumn 17, Issue 6, 2002, Pages 1455-1462

  Lee, Si Hyung ^a,b   Lee, Jeon Kook ^a,b   Yoon, Ki Hyun ^b  

^a Korea Institute of Science and Technology   (South Korea)

^b Yonsei University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL ORIENTATION; DECOMPOSITION; ELECTRIC PROPERTIES; FILM GROWTH; MAGNETRON SPUTTERING; POLYCRYSTALLINE MATERIALS; PRESSURE EFFECTS; STOICHIOMETRY; STRONTIUM COMPOUNDS;

ATOMIC MIGRATION ENERGY; SPUTTERING PRESSURE; STRONTIUM BISMUTH TANTALATE;

FERROELECTRIC THIN FILMS;

EID: 0036600901     PISSN: 08842914     EISSN: None     Source Type: Journal    
DOI: 10.1557/JMR.2002.0216     Document Type: Article

References (28)