|
Volumn 433, Issue , 1996, Pages 109-118
|
Evaluation of SrBi2Ta2O9 films for ferroelectric memories
a |
Author keywords
[No Author keywords available]
|
Indexed keywords
CHEMICAL VAPOR DEPOSITION;
CRYSTAL MICROSTRUCTURE;
DIELECTRIC FILMS;
FILM GROWTH;
MICROANALYSIS;
NONVOLATILE STORAGE;
POLYCRYSTALLINE MATERIALS;
STRONTIUM COMPOUNDS;
X RAY CRYSTALLOGRAPHY;
X RAY PHOTOELECTRON SPECTROSCOPY;
FERROELECTRIC MEMORIES;
FILM STRUCTURE;
PHASE STRUCTURE;
FERROELECTRIC MATERIALS;
|
EID: 0030400714
PISSN: 02729172
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1557/proc-433-109 Document Type: Conference Paper |
Times cited : (40)
|
References (16)
|