SCOPUS 정보 검색 플랫폼

Volumn 17, Issue 6, 2002, Pages 1371-1375

Effects of postdeposition in situ heat treatment on the properties of low dielectric constant plasma polymer films deposited using decahydronaphthalene and tetraethyl orthosilicate as the precursors

(3) Yang, Jaeyoung a Shim, Cheonman a Jung, Donggeun a

a Sungkyunkwan University (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

ABSORPTION SPECTROSCOPY; CORRELATION METHODS; CURRENT DENSITY; DEPOSITION; FOURIER TRANSFORM INFRARED SPECTROSCOPY; HEAT TREATMENT; ORGANIC POLYMERS; PERMITTIVITY; PLASMA APPLICATIONS; POLYMERIZATION; THERMAL EFFECTS;

DECAHYDRONAPHTHALENE; POSTDEPOSITION EFFECTS; TETRAETHYLORTHOSILICATE;

PLASTIC FILMS;

EID: 0036600618 PISSN: 08842914 EISSN: None Source Type: Journal
DOI: 10.1557/JMR.2002.0204 Document Type: Article

Times cited : (5)

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