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Materials Transactions

Volumn 43, Issue 6, 2002, Pages 1398-1402

DLC film fabricated by a composite technique of unbalanced magnetron sputtering and PIII

(5) Ma, Feng a Chen, Qiulong a Cai, Xun a Li, Gang a Ma, Hongtao a

a SHANGHAI JIAO TONG UNIVERSITY (China)

Author keywords

Amorphous carbon; Mechanical properties; Multilayer films; Nanoindentation; Plasma immersion ion implantation

Indexed keywords

AUGER ELECTRON SPECTROSCOPY; ELASTIC MODULI; FRACTURE TOUGHNESS; HARDNESS; ION IMPLANTATION; MAGNETRON SPUTTERING; MULTILAYERS; PLASMA APPLICATIONS; RAMAN SCATTERING; RAMAN SPECTROSCOPY; STAINLESS STEEL; X RAY DIFFRACTION ANALYSIS;

NANOINDENTATION; PLASMA IMMERSION ION IMPLANTATION (PIII);

DIAMOND LIKE CARBON FILMS;

EID: 0036600164 PISSN: 13459678 EISSN: None Source Type: Journal
DOI: 10.2320/matertrans.43.1398 Document Type: Article

Times cited : (9)

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