Development of a multilayer Fresnel zone plate for high-energy synchrotron radiation X-rays by DC sputtering deposition

Journal of Synchrotron Radiation

Volumn 9, Issue 3, 2002, Pages 154-159

  Tamura, S ^a   Yasumoto, M ^a   Kamijo, N ^a   Suzuki, Y ^a   Awaji, M ^a   Takeuchi, A ^a   Takano, H ^a   Handa, K ^a  

^a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

Author keywords

Fresnel zone plates; Hard X ray microbeams; Multilayer Fresnel zone plates; Scanning hard X ray microscopy

Indexed keywords

CONFERENCE PAPER;

EID: 0036587154     PISSN: 09090495     EISSN: None     Source Type: Journal    
DOI: 10.1107/S0909049502003746     Document Type: Conference Paper

References (46)

1. Aristov, V., Chukalina, M., Firsov, A., Ishikawa, T., Kikuta, S., Kohmura, Y., Svintsov, A. & Zaitsev, S. (2000). X-ray Microscopy, Proceedings of the Sixth International Conference, pp. 554-557. New York: American Institute of Physics.
2. Aristov, V., Firsov, A., Grigoriev, M., Ishikawa, T., Kikuta, S., Kohmura, Y., Kuznetsov, S., Shabelnikov, L. & Yunkin, V. (2000). X-ray Microscopy, Proceedings of the Sixth International Conference, pp. 558-561. New York: American Institute of Physics.
3. Aristov, V., Grigoriev, M., Kuznetsov, S., Shabelnikov, L., Yunkin, V., Rau, C., Snigirev, A., Snigireva, I., Weitkamp, T., Hoffmann, M. & Voges, E. (2001). Proc. SPIE, 4145, 285-293.
4. Awaji, M., Suzuki, Y., Takeuchi, A., Takano, H., Kamijo, N., Tamura, S. & Yasumoto, M. (2001). Nucl. Instrum. Methods A, 467/468, 845-848.
5. Bionta, R. M., Ables, E., Clamp, O., Edwards, O. D., Gabriele, P. C., Ott, L. L., Skulina. K. M. & Viada, T. (1990). Opt. Eng. 29, 576-580.
6. Ceglio, N. M., Hawryluk, A. M. & Schattenberg, M. (1983). J. Vac. Sci. Technol. B1, 1285-1288.
7. Düvel, A., Rudolph, D. & Schmahl, G. (2000). X-ray Microscopy, Proceedings of the Sixth International Conference, pp. 607-614. New York: American Institute of Physics.
8. Eng, P. J., Newville, N., Rivers, M. L. & Sutton, S. R. (1998). Proc. SPIE, 3449, 145-156.
9. Fujisaki, H. & Nakagiri, N. (1990). Appl. Opt. 29, 483-488.
10. Hart, H. E., Scrandis, J. B., Mark, R. & Hatcher, R. D. (1966). J. Opt. Soc. Am. 56, 1018-1023.
11. Kagoshima, Y., Ibuki, T., Takai, K., Yokoyama, Y., Miyamoto, N., Tsusaka, Y. & Matsui, J. (2000). Jpn. J. Appl. Phys. 39, L433-L435.
12. Kamijo, N., Suzuki, Y., Awaji, M., Takeuchi, A., Uesugi, K., Yasumoto, M., Tamura, S., Kohmura, Y., Duevel, A., Rudolph, D. & Schmahl, G. (2001). Nucl. Instrum. Methods A, 467/468, 868-871.
13. Kamijo, N., Suzuki, Y., Awaji, M., Tamura, S., Takeuchi, A., Takano, H. & Yasumoto, M. (2001). SPring-8 User Experimental Report No.6 (2000B), p. 186. SPring-8, Hyogo, Japan.
14. Kamijo, N., Suzuki, Y., Tamura, S., Awaji, M., Yasumoto, M., Kohmura, Y. & Handa, H. (2000). X-ray Microscopy, Proceedings of the Sixth International Conference, pp. 672-675. New York: American Institute of Physics.
15. Kamijo, N., Suzuki, Y, Tamura, S., Handa, K., Takeuchi, A., Yamamoto, S., Ando, M., Ohsumi, K. & Kihara, H. (1997). Rev. Sci. Instrum. 68, 14-16.
16. Kaulich, B., Barrett, R., Salomé, M., Oestreich, S. & Susini, J. (2000). ESRF Newslett. 34, 27-28.
17. Kohmura, Y., Okada, K., Takeuchi, A., Takano, H., Suzuki, Y, Ishikawa, T., Ohigashi, T. & Yokosuka, H. (2001). Nucl. Instrum. Methods A, 467/468, 881-883.
18. Lai, B., Yun, W. B., Legnini, D., Xiao, Y., Crzas, J., Viccaro, P. J., White, V., Denton, D., Cerrina, F., Di Fabrizio, E., Grella, L. & Baciocchi, M. (1992). Appl. Phys. Lett. 61, 1877-1879.
19. Lai, B., Yun, W., Maser, J., Cai, Z., Rodrigues, W., Legnini, D., Chen, Z., Krasnoperva, A. A., Vladimirsky, Y., Cerrina, F., Di Fabrizio, E. & Gentili, M. (1998). Proc. SPIE, 3449, 133-136.
20. Lengeler, B., Schroer, C. G., Richwin, M., Tümmler, J., Drakopoulos, M., Snigirev, A. & Snigireva, I. (1999). Appl. Phys. Lett. 74, 3924-3926.
21. MacDowell, A. A., Chang, C-H., Lamble, G. M., Celestre, R. S., Patel, J. R. & Padmore, H. A. (1998). Proc. SPIE, 3449, 137-144.
22. Niemann, B., Rudolph, D. & Schmahl, G. (1974). Opt. Commun. 12, 160-163.
23. Rudolph, D., Niemann, B. & Schmahl, G. (1981). Proc. SPIE, 316, 103-105.
24. Saitoh, K., Inagawa, K., Kohra, K., Hayashi, C., Iida, A. & Kato, N. (1988). Jpn. J. Appl. Phys. 27, L2131-L2133.
25. Saitoh, K., Inagawa, K., Kohra, K., Hayashi, C., Iida, A. & Kato, N. (1989). Rev. Sci. Instrum. 60, 1519-1523.
26. Schneider, G., Schliebe, T. & Aschoff, H. (1995). J. Vac. Sci. Technol. B13, 2809-2812.
27. Shastri, S. D., Maser, J. M., Lai, B. & Tys, J. (2000). http://www.aps.anl.gov/xfd/communicator/user2000/shastris3.pdf.
28. Shaver, D. C., Flanders, D. C., Ceglio, N. M. & Smith, H. I. (1979). J. Vac. Sci. Technol. 16, 1626-1630.
29. Snigirev, A., Snigireva, I., Bösecke, P., Lequien, S. & Schelokov, I. (1997). Opt. Commun. 135, 378-384.
30. Snigirev, A., Snigireva, I., Engström, P., Lequien, S., Suvorov, A., Hartman, Ya., Chevallier, R, Idir, M., Legrand, F., Soullie, G. & Engrand, S. (1995). Rev. Sci. Instrum. 66, 1461-1463.
31. Suzuki, Y. (2000). SPring-8 Research Frontiers 1998/1999, pp. 68-69. SPring-8, Hyogo, Japan.
32. Suzuki, Y, Awaji, M., Kohmura, Y., Takeuchi, A., Kamijo, N., Tamura, S. & Handa, K. (2000). X-ray Microscopy, Proceedings of the Sixth International Conference, pp. 535-538. New York: American Institute of Physics.
33. Suzuki, Y., Awaji, M., Kohmura, Y., Takeuchi, A., Takano, H., Kamijo, N., Tamura, S., Yasumoto, M. & Handa, K. (2001). Nucl. Instrum. Methods A, 467/468, 951-953.
34. Suzuki, Y., Kamijo, N., Tamura, S., Handa, K., Takeuchi, A., Yamamoto, S., Sugiyama, H., Ohsumi, K. & Ando, M. (1997). J. Synchrotron Rad. 4, 60-63.
35. Suzuki, Y. & Uchida, F. (1992). Rev. Sci. Instrum. 63, 578-581.
36. Suzuki, Y., Uchida, F. & Hirai, Y. (1989). Jpn. J. Appl. Phys. 28, L1660-1662.
37. Tamura, S., Mori, K., Maruhashi, T., Yoshida, K., Ohtani, K., Kamijo, N., Suzuki, Y. & Kihara, H. (1997). Mater. Res. Soc. Proc. 441, 779-784.
38. Tamura, S., Murai, K., Kamijo, N., Yoshida, K., Kihara, K. & Suzuki, Y. (2000). Vacuum, 59, 553-558.
39. Tamura, S., Ohtani, K. & Kamijo, N. (1994). Appl. Surf. Sci. 79/80, 514-518.
40. Tamura, S., Ohtani, K., Yasumoto, M., Murai, K., Kamijo, N., Kihara, H., Yoshida, K. & Suzuki, Y. (1998). Mater. Res. Soc. Proc. 524, 31-36.
41. Thornton, J. A. (1986). J. Vac. Sci. Technol. 4, 3059-3065.
42. Underwood, J. H., Thompson, A. C., Wu, Y. & Giauque, R. D. (1988). Nucl. Instrum. Methods A, 266, 296-302.
43. Vladimirsky, Y., Kern, D., Meyer-llse, W. & Attwood, D. (1989). Appl. Phys. Lett. 54, 286-288.
44. Yasumoto, M., Tamura, S., Kamijo, N., Suzuki, Y., Awaji, M., Takeuchi, A., Takano, H., Kohmura, Y. & Handa, K. (2001). Jpn. 7. Appl. Phys. 40, 4747-4748.
45. Yun, W., Lai, B., Cai, Z., Maser, J., Legnini, D., Gluskin, E., Chen, Z., Krasnoperva, A. A., Vladimirsky, Y., Cerrina, F., Di Fabrizio, E. & Gentili, M. (1999). Rev. Sci. Instrum. 70, 2238-2241.
46. Zhang, Y., Katoh, T., Kagoshima, Y., Matsui, J. & Tsusaka, Y. (2001). Jpn. J. Appl. Phys. 40, L75-L77.