Multilayer Fresnel zone plate for 8KeV X-ray by DC magnetron sputtering deposition

Materials Research Society Symposium - Proceedings

Volumn 441, Issue , 1997, Pages 779-784

  Tamura, S ^a   Mori, K ^a   Maruhashi, T ^a   Yoshida, K ^a   Ohtani, K ^a   Kamijyo, N ^a   Suzuki, Y ^a   Kihara, H ^a  

^a OSAKA NATIONAL RESEARCH INSTITUTE   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

MAGNETRON SPUTTERING; PRESSURE EFFECTS; SPUTTER DEPOSITION; SUBSTRATES; SYNCHROTRON RADIATION;

FRESNEL ZONE PLATES; ZONE BOUNDARY STRUCTURES;

MULTILAYERS;

EID: 0030721097     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (14)