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Volumn 46, Issue 5, 2002, Pages 695-698
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Fabrication of AlGaN/GaN heterostructure field effect transistor using room-temperature ohmic contact
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Author keywords
[No Author keywords available]
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Indexed keywords
ALUMINUM;
CURRENT DENSITY;
GALLIUM NITRIDE;
HETEROJUNCTIONS;
INDUCTIVELY COUPLED PLASMA;
OHMIC CONTACTS;
TRANSCONDUCTANCE;
DRAIN CURRENT DENSITY;
FIELD EFFECT TRANSISTORS;
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EID: 0036568213
PISSN: 00381101
EISSN: None
Source Type: Journal
DOI: 10.1016/S0038-1101(01)00325-2 Document Type: Article |
Times cited : (12)
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References (10)
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