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Volumn 9, Issue 3, 2002, Pages 112-121

Profilometry of sloped plane surfaces by wavelength scanning interferometry

(2) Yamamoto, Akihiro a Yamaguchi, Ichirou a

a INST OF PHYS AND CHEMICAL RESEARCH (Japan)

Author keywords

Image processing; Profilometry; Wavelength scanning interferometry

Indexed keywords

EID: 0036562924 PISSN: 13406000 EISSN: None Source Type: Journal
DOI: 10.1007/s10043-002-0112-2 Document Type: Article

Times cited : (17)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.