Speckle decorrelation in surface profilometry by wavelength scanning interferometry

Applied Optics

Volumn 37, Issue 28, 1998, Pages 6721-6728

  Yamaguchi, Ichirou ^a   Yamamoto, Akihiro ^a   Kuwamura, Susumu ^a,b  

^a INST OF PHYS AND CHEMICAL RESEARCH   (Japan)

^b KITAMI INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

DYE LASERS; FOURIER TRANSFORMS; FUNCTIONS; IMAGING SYSTEMS; NUMERICAL ANALYSIS; SPECKLE; SURFACE MEASUREMENT; SURFACE ROUGHNESS; SURFACES;

SHAPE MEASUREMENT; SPECKLE DECORRELATION; SURFACE PROFILOMETRY; WAVELENGTH SCANNING INTERFEROMETRY;

INTERFEROMETRY;

EID: 0032185918     PISSN: 1559128X     EISSN: 21553165     Source Type: Journal    
DOI: 10.1364/AO.37.006721     Document Type: Article

References (12)

1. M. Takeda and K. Mutoh, “Fourier transform profilometry for automatic measurement of 3-D object shapes, ” Appl. Opt. 22, 3977-3982 (1983).
2. M. Haliouna and H. C. Ling, “Optical three-dimensional sensing by phase-measuring profilometry, ” Opt. Lasers Eng. 11, 185-215 (1989).
3. Y. Zou, Y. Diao, Y. Peng, and H. Tiziani, “Geometry for contouring by electronic speckle pattern interferometry based on shifting illumination beams, ” Appl. Opt. 31, 6616-6621 (1992).
4. R. R. Vera, D. Kerr, and F. M. Santoyo, “Electronic speckle contouring, ” J. Opt. Soc. Am. A 9, 2000-2008 (1992).
5. T. Dresel, G. Hausler, and H. Venzke, “Three-dimensional sensing of rough surfaces by coherence radar, ” Appl. Opt. 31, 919-925 (1992).
6. M. Takeda and H. Yamamoto, “Fourier-transform speckle pro-filometry: three-dimensional shape measurements of diffuse objects with large height steps and/or spatially isolated surfaces, ” Appl. Opt. 33, 7829-7837 (1994).
7. T. H. Barnes, T. Eiju, and K. Matsuda, “Rough surface profile measurement using speckle optical frequency domain reflec-tometry with an external cavity tunable diode laser, ” Optik 103, 93-100 (1996).
8. S. Kuwamura and I. Yamaguchi, “Wavelength scanning pro-filometry for real-time surface shape measurement, ” Appl. Opt. 37, 4473-4482 (1997).
9. I. Yamaguchi, “Fringe loci and visibility in holographic inter-ferometry with diffuse objects, ” Opt. Acta 25, 299-314 (1978).
10. I. Yamaguchi, “Fringe formations in deformation and vibration measurements using laser light, ” in Progress in Optics, E. Wolf, ed. (Elsevier, Amsterdam, 1985), Vol. 22, pp. 271-340.
11. J. A. Ratcliff, “Some aspects of diffraction theory and their application to the ionosphere, ” Rept. Progr. Phys. 19, 188-240 (1956).
12. M. Born and E. Wolf, Principles of Optics, 4th ed. (Pergamon, London, 1970), p. 441.