Formation of a fine-patterned ferroelectric thin film from a sol-gel solution containing a photo-sensitive water-generator

IEEE International Symposium on Applications of Ferroelectrics

Volumn , Issue , 1994, Pages 408-411

  Soyama, Nobuyuki ^a   Sasaki, Go ^a   Atsuki, Tsutomu ^a   Yonezawa, Tadashi ^a   Ogi, Katsumi ^a  

^a MITSUBISHI MATERIALS CORPORATION   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

COATING TECHNIQUES; CRYSTALLIZATION; ELECTRIC PROPERTIES; FERROELECTRIC MATERIALS; HYDROLYSIS; PEROVSKITE; PHOTOSENSITIVITY; SOL-GELS; SOLUTIONS; THIN FILMS; ULTRAVIOLET RADIATION;

FINE PATTERNED FERROELECTRIC THIN FILM; PHOTOSENSITIVE WATER GENERATOR; SPIN COATED GEL FILMS;

LEAD COMPOUNDS;

EID: 0028705096     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (7)