A free-hanging strain-gauge for ultraminiaturized pressure sensors

Sensors and Actuators, A: Physical

Volumn 97-98, Issue , 2002, Pages 75-82

  Melvås, Patrik ^a   Kälvesten, Edvard ^a   Enoksson, Peter ^a   Stemme, Göran ^a  

^a ROYAL INSTITUTE OF TECHNOLOGY   (Sweden)

Author keywords

Force transducing beam; Miniaturized; Pressure sensor

Indexed keywords

BLOOD VESSELS; CATHETERS; HEMODYNAMICS; POLYSILICON; PRESSURE MEASUREMENT; STRAIN GAGES;

FORCE TRANSDUCING BEAM; FREE HANGING STRAIN GAUGE; HIGH PRESSURE SENSITIVITY; POLYSILICON DIAPHRAGM; ULTRAMINIATURIZED PRESSURE SENSOR;

MICROSENSORS;

EID: 0036544430     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(01)00798-1     Document Type: Conference Paper

References (21)

1. Micromachined 125 μm diameter ultra miniature fiber-optic pressure sensor for catheter
2. A fiber-optic pressure microsensor for biomedical applications
3. A fiberoptic silicon pressure microsensor for measurements in coronary arteries
4. An ultraminiature CMOS pressure sensor for a multiplexed cardiovascular catherer
5. Ultraminiature silicon capacitive pressure-sensing elements obtained by silicon fusion bonding
6. The first surface micromachined pressure sensor for cardiovascular pressure measurements
7. Development of a miniature pressure transducer for biomedical applications
8. Disposable CMOS catheter-tip pressure sensor for intracranial pressure measurement
9. Pressure, flow and oxygen saturation sensors on one chip for use in catheters
10. Scaling limits in batch-fabricated silicon pressure sensors
11. Silicon pressure sensors with a thick film periphery
12. A high-sensitivity integrated-circuit capacitive pressure transducer
13. Surface micromachined pressure transducers
14. Media protected surface micromachined leverage beam pressure sensor
15. Ambient humidity and moisture-a decisive failure source in piezoresistive sensors
16. Fabrication of catheter-tip and sidewall miniature pressure sensors
17. Approximate analysis of the large deflection elastic behaviour of clamped, uniformly loaded, rectangular plates
18. Small piezoresistive silicon microphones specially designed for the characterization of turbulent gas flows
19. Fine grained film and its application to planar pressure transducers