-
2
-
-
0003945231
-
Multi-user MEMS processes (MUMPs): Introduction and design rules, rev.4
-
3021 Cornwallis Road, Research Triangle Park, NC 27709
-
A. Koester, R. Mahadevan and K.W. Markus, "Multi-user MEMS processes (MUMPs): Introduction and design rules, rev.4," Technical Report, MCNC MEMS Technical applications center, 3021 Cornwallis Road, Research Triangle Park, NC 27709, 1996.
-
(1996)
Technical Report, MCNC MEMS Technical Applications Center
-
-
Koester, A.1
Mahadevan, R.2
Markus, K.W.3
-
3
-
-
0000213239
-
Challenges in the packaging of MEMS
-
A.P. Malshe, C. O'Neal, S.B. Singh, W.D. Brown, W.P. Eaton and W.M. Miller. "Challenges in the packaging of MEMS," international Journal of Microcircuits and Electronic Packaging, vol. 22, no. 3, pp. 233-241, 1999.
-
(1999)
International Journal of Microcircuits and Electronic Packaging
, vol.22
, Issue.3
, pp. 233-241
-
-
Malshe, A.P.1
O'Neal, C.2
Singh, S.B.3
Brown, W.D.4
Eaton, W.P.5
Miller, W.M.6
-
4
-
-
0003255161
-
Realizing suspended structures on chips fabricated by CMOS foundry processes through the MOSIS service
-
June
-
J. Marshall, M. Gaitan, M. Zaghloul, D. Novotny, V. Tyree, J.-I. Pi, C. Pina, and W. Hansford, "Realizing suspended structures on chips fabricated by CMOS foundry processes through the MOSIS service," NISTIR 5402, June 1994.
-
(1994)
NISTIR 5402
-
-
Marshall, J.1
Gaitan, M.2
Zaghloul, M.3
Novotny, D.4
Tyree, V.5
Pi, J.-I.6
Pina, C.7
Hansford, W.8
-
5
-
-
0029517967
-
A CMOS compatible traction stress sensing element for use in high resolution tactile imaging
-
Stockholm, Sweden
-
B.J. Kane and G.T.A. Kovacs. "A CMOS compatible traction stress sensing element for use in high resolution tactile imaging," Technical Digest of Transducers /95/Eurosensors, Stockholm, Sweden, vol. 1, no. 1, pp. 648-651, 1995.
-
(1995)
Technical Digest of Transducers /95/Eurosensors
, vol.1
, Issue.1
, pp. 648-651
-
-
Kane, B.J.1
Kovacs, G.T.A.2
-
7
-
-
0027565639
-
Analysis of tip deflection and force of a bimetallic cantilever microactuator
-
W.H. Chu, M. Mehregany and R.L. Mullen, "Analysis of tip deflection and force of a bimetallic cantilever microactuator, "Journal of Micromech, Microeng., vol. 3, pp. 4-7, 1993.
-
(1993)
Journal of Micromech, Microeng.
, vol.3
, pp. 4-7
-
-
Chu, W.H.1
Mehregany, M.2
Mullen, R.L.3
-
10
-
-
0029419002
-
Mechanical and optical characteristization of thermal microactuators fabricated in a CMOS process
-
B.C. Read, V.M. Bright and J.H. Comtois, "Mechanical and optical characteristization of thermal microactuators fabricated in a CMOS process," Proceedings of the SPIE, vol. 2642, pp. 22-32,1995.
-
(1995)
Proceedings of the SPIE
, vol.2642
, pp. 22-32
-
-
Read, B.C.1
Bright, V.M.2
Comtois, J.H.3
-
11
-
-
0006674705
-
Microfluidic system for perfusion of solutions to neurons in a network
-
September 21-24 Warsaw, Poland
-
M. O. Heuschkel, L. Guérin, B. Buisson, D. Bertrand and P. Renaud, "Microfluidic system for perfusion of solutions to neurons in a network," Proceedings of the 11th European Conference on Solid-State Transducers (EUROSENSORS XI). September 21-24, 1997, Warsaw, Poland, pp. 349-352.
-
(1997)
Proceedings of the 11th European Conference on Solid-State Transducers (EUROSENSORS XI)
, pp. 349-352
-
-
Heuschkel, M.O.1
Guérin, L.2
Buisson, B.3
Bertrand, D.4
Renaud, P.5
-
15
-
-
0017103012
-
The encapsulation of microelectronic devices for long term surgical implantation
-
P.E.K. Donalson, "The encapsulation of microelectronic devices for long term surgical implantation, "IEEE Transactions on Biomedical Engineering, vol.BME-23, no.4, p. 281-5, 1976.
-
(1976)
IEEE Transactions on Biomedical Engineering
, vol.BME-23
, Issue.4
, pp. 281-285
-
-
Donalson, P.E.K.1
|