Phase-shifting interferometry: Measurements with high-reflectance surfaces

Optical Engineering

Volumn 41, Issue 4, 2002, Pages 856-859

  Hariharan, Parameswaran ^a  

^a UNIVERSITY OF SYDNEY   (Australia)

Author keywords

Fizeau interferometer; Highreflectance surfaces; Optical testing; Phase shifting

Indexed keywords

ALGORITHMS; INTERFEROMETRY; OPTICAL TESTING; PHASE SHIFT; SUBSTRATES;

PHASE-SHIFTING INTERFEROMETRY;

OPTICAL SYSTEMS;

EID: 0036541215     PISSN: 00913286     EISSN: None     Source Type: Journal    
DOI: 10.1117/1.1457461     Document Type: Article

References (15)

1. Digital phase-shifting interferometry: Effects of multiply reflected beams
2. Surface-coated reference flats for testing fully aluminized surfaces by means of the Fizeau interferometer
3. Coating requirements for the reference flat of a Fizeau interferometer used for measuring from uncoated to highly reflecting surfaces
4. Choosing a phase-measurement algorithm for measurement of coated LIGO optics
5. Interferometric testing of smooth surfaces
6. Interferometric testing of optical surfaces: Absolute measurements of flatness
7. Interferometric measurements of small-scale irregularities: Highly reflecting surfaces
8. Phase-shifting for nonsinusoidal waveforms with phase-shift errors
9. Extended averaging technique for derivation of error-compensating algorithms in phase-shifting interferometry
10. Design of algorithms for phase measurements by the use of phase-stepping
11. Influence of multiple-beam interference in a phase shifting Fizeau interferometer and error-reduced algorithms
12. Phase-shifting interferometry: Minimization of systematic errors
13. Minimization of errors in phase-shifting interferometry: Evaluation of residuals
14. Additive noise effects in digital phase detection
15. Effects of quantization error on the computed phase of phase-shifting measurements