Minimization of systematic errors in phase-shifting interferometry: evaluation of residuals

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4101, Issue , 2000, Pages

  Hariharan, Parameswaran ^a   Pryputniewicz, Emily J ^a   Pryputniewicz, Ryszard J ^a  

^a UNIVERSITY OF SYDNEY   (Australia)

Author keywords

[No Author keywords available]

Indexed keywords

ERROR REDUCTION; OPTICAL SURFACES; PHASE SHIFTING INTERFEROMETRY; RESIDUAL ERRORS;

CAMERAS; CHARGE COUPLED DEVICES; NUMERICAL METHODS; OPTICAL TESTING; PHASE SHIFT; SYSTEMATIC ERRORS;

INTERFEROMETRY;

EID: 0033717721     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (16)