Electronic transport in low temperature nanocrystalline silicon thin-film transistors obtained by hot-wire CVD

Journal of Non-Crystalline Solids

Volumn 299-302, Issue , 2002, Pages 400-404

  Puigdollers, J ^a   Voz, C ^a   Orpella, A ^a   Martin I ^a   Alcubilla, R ^a   Soler, D ^b   Fonrodona, M ^b   Bertomeu, J ^b   Andreu, J ^b  

^a UNIVERSITAT POLITÈCNICA DE CATALUNYA   (Spain)

^b UNIVERSITY OF BARCELONA   (Spain)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL VAPOR DEPOSITION; CRYSTAL MICROSTRUCTURE; ELECTRON MOBILITY; HYDROGENATION; INTERFACES (MATERIALS); LOW TEMPERATURE EFFECTS; NANOSTRUCTURED MATERIALS; SEMICONDUCTING SILICON; THIN FILM TRANSISTORS;

HOT-WIRE CHEMICAL VAPOUR DEPOSITION (HWCVD);

THIN FILMS;

EID: 0036540425     PISSN: 00223093     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0022-3093(01)01015-8     Document Type: Article

References (13)