Poly-Si thin film transistors fabricated by combining excimer laser annealing and metal induced lateral crystallization

Journal of Non-Crystalline Solids

Volumn 299-302, Issue PART 2, 2002, Pages 1330-1334

  Park, Kee Chan ^a   Lee, Jae Hoon ^a   Song, In Hyuk ^a   Jung, Sang Hoon ^a   Han, Min Koo ^a  

^a Seoul National University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; CARRIER MOBILITY; CRYSTALLIZATION; EXCIMER LASERS; LASER BEAM EFFECTS; LIGHT EMITTING DIODES; LIQUID CRYSTAL DISPLAYS; POLYSILICON;

POLYCRYSTALLINE SILICON GRAINS;

THIN FILM TRANSISTORS;

EID: 0036531198     PISSN: 00223093     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0022-3093(01)01097-3     Document Type: Article

References (9)