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Journal of Crystal Growth

Volumn 237-239, Issue 1-4, 2002, Pages 1757-1761

Numerical study of 3D unsteady melt convection during industrial-scale CZ Si-crystal growth

(12) Evstratov, I Yu a Kalaev, V V a Zhmakin, A I a Makarov, Yu N b Abramov, A G c Ivanov, N G c Korsakov, A B c Smirnov, E M c Dornberger, E d Virbulis, J d Tomzig, E d Von Ammon, W d

a SOFT IMPACT LTD (Russian Federation)

b Semiconductor Technology Research Corp (United States)

c PETER THE GREAT ST PETERSBURG POLYTECHNIC UNIVERSITY (Russian Federation)

d SILTRONIC AG (Germany)

Author keywords

A1. Magnetic fields; A1. Turbulent convection; A2. Czochralski method; B1. Silicon

Indexed keywords

COMPUTER SIMULATION; HEAT CONVECTION; MAGNETIC FIELD EFFECTS; MATHEMATICAL MODELS; SEMICONDUCTING SILICON; TURBULENT FLOW;

TURBULENT CONVECTION;

CRYSTAL GROWTH FROM MELT;

EID: 0036530467 PISSN: 00220248 EISSN: None Source Type: Journal
DOI: 10.1016/S0022-0248(01)02327-2 Document Type: Article

Times cited : (23)

References (8)

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2
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- Evstratov, I.Y.¹ Kalaev, V.V.² Zhmakin, A.I.³ Makarov, Y.N.⁴ Abramov, A.G.⁵ Ivanov, N.G.⁶ Smirnov, E.M.⁷ Dornberger, E.⁸ Virbulis, J.⁹ Tomzig, E.¹⁰ Von Ammon, W.¹¹

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4
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5
- 0031244641
- (1997) J. Crystal Growth , vol.180 , pp. 461
- Dornberger, E.¹ Tomzig, E.² Seidl, A.³ Schmitt, S.⁴ Leister, H.-L.⁵ Schmitt, C.⁶ Müller, G.⁷

6
- 84893376016
- September 11-14, Barcelona, Spain, CD-ROM Proceeding
- (2000) ECCOMAS-2000
- Kalaev, V.V.¹ Evstratov, I.Y.² Makarov, Y.N.³ Smirnov, E.M.⁴ Zhmakin, A.I.⁵

7
- 0003422378
- October, Huntsville, AL
- (1998) Command Language Manual, Version 5

8
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- (2001) Microelectron. Eng. , vol.56 , pp. 83
- Gräbner, O.¹ Müller, G.² Virbulis, J.³ Tomzig, E.⁴ Von Ammon, J.W.⁵

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.