Effects of various magnetic field configurations on temperature distributions in Czochralski silicon melts

Microelectronic Engineering

Volumn 56, Issue 1-2, 2001, Pages 83-88

  Grabner O ^a   Muller G ^a   Virbulis, J ^b   Tomzig, E ^b   Ammon, W V ^b  

^a UNIVERSITY OF ERLANGEN NUREMBERG   (Germany)

^b SILTRONIC AG   (Germany)

Author keywords

Czochralski crystal growth; Magnetic fields, Temperature distribution; Silicon

Indexed keywords

COMPUTER SIMULATION; CRYSTAL GROWTH FROM MELT; DAMPING; HEAT TRANSFER; MAGNETIC FIELD EFFECTS; MASS TRANSFER; TEMPERATURE DISTRIBUTION; THERMOCOUPLES; TURBULENT FLOW;

CZOCHRALSKI SILICON MELTS;

SILICON WAFERS;

EID: 0035341747     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0167-9317(00)00507-4     Document Type: Article

References (11)

1. E. Tomzig, W.v. Ammon, E. Dornberger, U. Lambert, W. Zulehner, Microelectron. Eng. 45 (1999) 113-125.
2. O. Gräbner, A. Mühe, G. Müller, B. Tomzig, J. Virbulis, W.v. Ammon, Mater. Sci. Eng. B73 (2000) 130-133.
3. T. Kanda, M. Hourai, S. Miki, T. Shigematsu, H. Tomokage, T. Miyano, H. Morita, A. Shintani, J. Cryst. Growth 166 (1996) 663-668.
4. H. Hirata, K. Hoshikawa, N. Inoue, J. Cryst. Growth 70 (1984) 330-334.
5. M. Watanabe, Electrochem. Soc. 98 (1) (1998) 441-452.
6. Y.S. Lee, Ch.-H. Chun, J. Cryst. Growth 180 (1997) 477-486.
7. M. Watanabe, K. Kakimoto, M. Eguchi, T. Hibiya, Jpn. J. Appl. Phys. 36 (1997) 6181-6186.
8. Y. Gelfgat, L. Gorbunov, W. v. Ammon, J. Virbulis, E. Tomzig, in preparation.
9. CFD-ACE Theory Manual. Version 4.0, CFD Research Corporation, 1998.
10. A. Mühlbauer, A. Muiznieks, G. Raming, H. Riemann, A. Lüdge, J. Cryst. Growth 198/199 (1999) 107-113.
11. J. Virbulis, T. Wetzel, A. Muiznieks, G. Raming, B. Rexer, E. Dornberger, W.v. Ammon, A. Mühlbauer, in: Proceedings International Colloquium on Modelling of Material Processing, Riga, May 28-29, 1999.