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Volumn 48, Issue 2-3, 2002, Pages 229-235

Surface and interface morphology of CoSi2 films formed by multilayer solid-state reaction

Author keywords

[No Author keywords available]

Indexed keywords

CMOS INTEGRATED CIRCUITS; COBALT COMPOUNDS; INTERFACES (MATERIALS); MORPHOLOGY; SURFACE ROUGHNESS; THERMODYNAMIC STABILITY;

EID: 0036526408     PISSN: 10445803     EISSN: None     Source Type: Journal    
DOI: 10.1016/S1044-5803(02)00252-8     Document Type: Conference Paper
Times cited : (5)

References (22)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.