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Volumn 48, Issue 2-3, 2002, Pages 205-210
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Studying the high-field electron conduction of tetrahedral amorphous carbon thin films by conducting atomic force microscopy
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Author keywords
Conducting atomic force; Microscopy; Ta carbon films
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Indexed keywords
ATOMIC FORCE MICROSCOPY;
CARBON;
DEPOSITION;
ELECTRIC CONDUCTANCE;
ELECTRON TRANSPORT PROPERTIES;
MORPHOLOGY;
SUBSTRATES;
THIN FILMS;
CARBON THIN FILMS;
AMORPHOUS FILMS;
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EID: 0036526373
PISSN: 10445803
EISSN: None
Source Type: Journal
DOI: 10.1016/S1044-5803(02)00240-1 Document Type: Conference Paper |
Times cited : (13)
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References (14)
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