Optical and electrical properties of nitrogen incorporated amorphous carbon films

Journal of Applied Physics

Volumn 87, Issue 6, 2000, Pages 2874-2879

  Yu, Y H ^a,b   Chen, Z Y ^a   Luo, E Z ^b   Cheung, W Y ^b   Zhao, J P ^a   Wang, X ^a   Xu, J B ^b   Wong, S P ^b   Wilson, I H ^b  

^a SHANGHAI INSTITUTE OF MICROSYSTEM AND INFORMATION TECHNOLOGY   (China)

^b CHINESE UNIVERSITY OF HONG KONG   (Hong Kong)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0005328308     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.372271     Document Type: Article

References (20)

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